JPS6423864U - - Google Patents

Info

Publication number
JPS6423864U
JPS6423864U JP11829187U JP11829187U JPS6423864U JP S6423864 U JPS6423864 U JP S6423864U JP 11829187 U JP11829187 U JP 11829187U JP 11829187 U JP11829187 U JP 11829187U JP S6423864 U JPS6423864 U JP S6423864U
Authority
JP
Japan
Prior art keywords
sample surface
exhaust chamber
preliminary exhaust
sample
beam irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11829187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548358Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11829187U priority Critical patent/JPH0548358Y2/ja
Publication of JPS6423864U publication Critical patent/JPS6423864U/ja
Application granted granted Critical
Publication of JPH0548358Y2 publication Critical patent/JPH0548358Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP11829187U 1987-07-31 1987-07-31 Expired - Lifetime JPH0548358Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11829187U JPH0548358Y2 (en]) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11829187U JPH0548358Y2 (en]) 1987-07-31 1987-07-31

Publications (2)

Publication Number Publication Date
JPS6423864U true JPS6423864U (en]) 1989-02-08
JPH0548358Y2 JPH0548358Y2 (en]) 1993-12-24

Family

ID=31362516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11829187U Expired - Lifetime JPH0548358Y2 (en]) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPH0548358Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0943174A (ja) * 1995-07-28 1997-02-14 Jeol Ltd プラズマエッチング装置を備えた表面分析装置
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器
WO2018020649A1 (ja) * 2016-07-29 2018-02-01 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0943174A (ja) * 1995-07-28 1997-02-14 Jeol Ltd プラズマエッチング装置を備えた表面分析装置
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器
US10144010B2 (en) 2014-07-29 2018-12-04 Leica Mikrosysteme Gmbh Manipulation holder for cryomicroscopy
WO2018020649A1 (ja) * 2016-07-29 2018-02-01 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0548358Y2 (en]) 1993-12-24

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